Method and apparatus for measuring pattern dimensions

Method and apparatus for measuring physical properties of...

Method and apparatus for measuring the distribution of elements

Method and apparatus for measuring the topography of a semicondu

Method and apparatus for measuring thickness of thin film

Method and apparatus for measuring three-dimensional shape...

Method and apparatus for molecular analysis of buried layers

Method and apparatus for monitoring astigmatism and focus in ele

Method and apparatus for monitoring the manufacture of a two-com

Method and apparatus for multiple charged particle beams

Method and apparatus for neutralizing an accumulated charge on a

Method and apparatus for observing a specimen

Method and apparatus for observing a specimen

Method and apparatus for observing inside structures, and...

Method and apparatus for observing or processing and...

Method and apparatus for obtaining images by raster scanning...

Method and apparatus for obtaining two- or three-dimensional inf

Method and apparatus for performing scanning tunneling optical a

Method and apparatus for photon-assisted evaluation of a plasma

Method and apparatus for preparing slurry specimens for cryo-sca