Method and apparatus for neutralizing an accumulated charge on a

Details Method and apparatus for neutralizing an accumulated charge on a Method and apparatus for neutralizing an accumulated charge on a

1988-08-17

1991-02-12

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250309, 250310, G01N 23225

Patent

active

049926616

ABSTRACT:
A method of neutralizing an accumulated charge on a surface of a specimen which is examined in a scanning electron microscope (SEM) or a scanning ion microprobe mass analyzer (IMA), utilizes an electrically conductive thin film deposited on a part of the specimen surface. The charge is due to irradiation by a primary charged particle beam from the SEM or IMA. The thin film is made conductivity with a specimen mount mounting the specimen, and the irradiating range of the primary beam covers at least a part of the thin film. Thus, the accumulated charge can be neutralized, thereby a resolution of the SEM being improved due to applying higher accelerating voltage for the primary beam, and measured data of higher reliability being obtained in the IMA.

REFERENCES:
patent: 4249077 (1981-02-01), Crawford
patent: 4453086 (1984-06-01), Grobman
patent: 4645929 (1987-02-01), Criegern et al.
patent: 4748325 (1988-05-01), Slodzian

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