Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2008-02-21
2009-12-15
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S310000, C250S311000, C250S492220, C250S492200, C430S030000, C430S296000, C430S942000
Reexamination Certificate
active
07633061
ABSTRACT:
It is difficult for a material having low resistance to electron beam irradiation to obtain an electron microscopic image having a high S/N ratio. A conventional image smoothing process can improve stability of measurement, but this process has a problem of measurement errors for absolute values, reduction of sensitivity, deterioration of quality of cubic shape information and the like. In the present invention, by performing an image averaging process without deteriorating cubic shape information of a signal waveform in consideration of dimension deviation of a measurement target pattern, measurement stability is compatible with improvement of precision and sensitivity. Accordingly, it is possible to realize measurement of pattern dimensions and shapes with high precision and control of a highly sensitive semiconductor manufacturing process using the measurement.
REFERENCES:
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patent: 2006/0245636 (2006-11-01), Kitamura et al.
Andrew Habermas, et al., 193nm CD Shrinkage Under SEM: Modeling the Mechanism, Proceedings of SPIE vol. 4689 (2002).
J.S. Villarrubia, et al., Scanning Electron Microscope Analog of Scatterometry, Proceedings of SPIE vol. 4689 2002, National Institute of Standard and Technology, Gaithersburg, MD 20899, USA.
Chie Shishido, et al., Does and Focus Estimation Using Top-Down SEM Images, Proceedings of SPIE vol. 5038 2003.
J.S. Villarrubia, et al., A Simulation Study of Repeatability and Bias in the CD-SEM, Proceedings of SPIE vol. 5038 2003, National Institute of Standard and Technology, Gaithersburg, MD 20889, USA.
Atsuko Yamaguchi, et al., Impact of Long-Period Line-Edge Roughness (LER) on Accuracy in CD Measurement, Proc. Of SPEC vol. 5752 (2005), Bellingham, WA.
Nagatomo Wataru
Shishido Chie
Tanaka Maki
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Wells Nikita
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