Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1997-12-18
2000-04-25
Berman, Jack
Radiant energy
Inspection of solids or liquids by charged particles
Methods
2502521R, G01N 23225
Patent
active
060547103
ABSTRACT:
A system for determining one or more critical dimension(s) of a semiconductor structure comprising a scanning electron microscope and a parallel distributed process operationally connected to an output of a scanning electron microscope. Said parallel distributed process containing coefficients that provide a multi dimensional mapping space for the output of said scanning electron microscope to map to an output value that provides information on the dimensions of the semiconductor structure.
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Berman Jack
Cypress Semiconductor Corp.
Maiorana P.C. Christopher P.
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