Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2007-01-16
2007-01-16
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S306000, C250S307000, C250S309000, C250S310000, C250S491100, C250S492220
Reexamination Certificate
active
10995388
ABSTRACT:
It is predicted that an observational direction (or an incident direction of an electron beam) in an observed image actually obtained has some errors compared to a set value. The error portion affects the analysis of the observed image later. Therefore, a convergent electron beam is irradiated on a specimen with a known shape, electrons discharged from the specimen surface are detected, an image of the electron is obtained, an incident direction of the convergent electron beam is estimated based on a geometric deformation on an image of the specimen with a known shape, and a 3D shape or a shape of a cross section of a specimen to be observed from a SEM image of the specimen to be observed is obtained by use of the information of the incident direction of the estimated convergent electron beam.
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Miyamoto Atsushi
Morokuma Hidetoshi
Tanaka Maki
Antonelli, Terry Stout and Kraus, LLP.
Hitachi High-Technologies Corporation
Souw Bernard E.
Wells Nikita
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