Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-06-27
2006-06-27
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S3960ML, C250S492200
Reexamination Certificate
active
07067809
ABSTRACT:
A multi-charged particle beam tool for semiconductor wafer inspection or lithography includes an array of electron beam columns, each having its own electron or ion source. The objective lenses of the various electron beam columns, while each has its own pole piece, share a common single magnetic coil which generates a uniform magnetic field surrounding the entire array of electron beam columns. This advantageously improves the spacing between the beams while providing the superior optical properties of a strong magnetic objective lens. When used as an inspection tool, each column also has its own associated detector to detect secondary and back-scattered electrons from the wafer under inspection. In one version the gun lenses similarly have individual pole pieces for each column and share a common magnetic coil.
REFERENCES:
patent: 3715580 (1973-02-01), Maekawa et al.
patent: 4209702 (1980-06-01), Shirai et al.
patent: 5557105 (1996-09-01), Honjo et al.
patent: 6369385 (2002-04-01), Muray et al.
patent: 6465783 (2002-10-01), Nakasuji
patent: 6593584 (2003-07-01), Krans et al.
patent: 6750455 (2004-06-01), Lo et al.
patent: 6787780 (2004-09-01), Hamaguchi et al.
T.R. Gorves, et al., “Distributed, multiple variable shaped electron beam column for high throughput maskless lithography”, J. Vac. Sci. Technol., B 16(6), Nov./Dec. 2000, pp. 3168-3173.
E. Yin, et al., “Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system”, J. Vac. Sci. Technol., B 18(6), Nov./Dec. 2000, pp. 3126-3131.
A. Khurshee, “Permanent magnet objective lenses for multicolumn electron-beam systems”, Review of Scientific Instruments, vol. 72, No. 4, Apr. 2001, pp. 2106-2109.
Eiichi Goto et al., “MOL (moving objective lens) Formulation of deflective aberration free system”, Optik, 48 (1977), No. 3, pp. 255-270.
Jiang Xinrong
Lo Chiwoei Wayne
Applied Materials Inc.
Berman Jack I.
Fahmi Tarek N.
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