Method and apparatus for measuring the distribution of elements

Details Method and apparatus for measuring the distribution of elements Method and apparatus for measuring the distribution of elements

1995-09-15

1997-01-21

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, H01J 3700

Patent

active

055961959

ABSTRACT:
An apparatus and method of identifying substances contained in a sample to both identify the elements in the sample and to measure a distribution of the elements are provided. The sample is scanned with electron beams to form X-ray images of two or elements. These X-ray images can be used to form a scattering diagram, and the composition of known materials can be plotted on the scattering diagram. The substances contained in the samples can be identified, and the distribution of the substances can be obtained by comparing the data on the scattering diagram with the plot.

REFERENCES:
patent: 4857731 (1989-08-01), Tagwa
patent: 5065020 (1991-11-01), Kanda

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