Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-06-12
2007-06-12
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S399000, C250S306000, C250S307000, C250S311000, C250S492300
Reexamination Certificate
active
11156478
ABSTRACT:
The present invention relates to a method and apparatus for measuring a three-dimensional profile using a SEM, capable of accurately measuring the three-dimensional profile of even a flat surface or a nearly vertical surface based on the inclination angle dependence of the amount of secondary electron image signal detected by the SEM. Specifically, a tilt image obtaining unit obtains a tilt image (a tilt secondary electron image) I(2) of flat regions a and c1on a pattern to be measured by using an electron beam incident on the pattern from an observation direction φ(2). Then, profile measuring units presume the slope (or surface inclination angle) at each point on the pattern based on the obtained tilt image and integrate successively each presumed slope value (or surface inclination angle value) to measure three-dimensional profiles S2aand S2c. This arrangement allows a three-dimensional profile to be accurately measured.
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Ikeda Mitsuji
Miyamoto Atsushi
Morokuma Hidetoshi
Shishido Chie
Tanaka Maki
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Souw Bernard
Wells Nikita
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