Method and apparatus for observing inside structures, and...

Details Method and apparatus for observing inside structures, and... Method and apparatus for observing inside structures, and...

2004-08-06

2008-12-09

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

Reexamination Certificate

active

07462830

ABSTRACT:
An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

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“New Semiconductor Device Evaluation System for Sub-nanometer Area Failure Analyses,” Takeo Kamino et al., vol. 85, No. 4, 2003, pp. 305-310.

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