Magnetically filtered low loss scanning electron microscopy

Details Magnetically filtered low loss scanning electron microscopy Magnetically filtered low loss scanning electron microscopy

1989-12-04

1990-10-09

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250311, 250305, 250397, 250306, H01J 37244

Patent

active

049623060

ABSTRACT:
An electron microscope which includes a detector which is located in the magnetic field used to focus the primary electron beam onto the sample. The focusing magnetic field is used to energy-filter and/or energy analyze the scattered electrons without the need for additional equipment, such as a retarding-field energy filter. The magnetic field of the condenser-objective lens (or of any other type of magnetic lens) of the microscope provides the filtering and/or analyzing action, and the detector can be located so as to collect only low-loss electrons.

REFERENCES:
patent: 3717761 (1973-02-01), Hirotami Koike et al.
patent: 3924126 (1975-12-01), Anderson et al.
patent: 4179604 (1979-12-01), Christon
patent: 4450355 (1984-05-01), Marien et al.
patent: 4633085 (1986-12-01), Tomita et al.
patent: 4910399 (1990-03-01), Taira et al.

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