Method and apparatus for analyzing sample

Details Method and apparatus for analyzing sample Method and apparatus for analyzing sample

2007-11-13

2009-08-25

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S492200, C378S046000

Reexamination Certificate

active

07579591

ABSTRACT:
Method and apparatus for performing sample analysis using both the WDS and an energy-dispersive X-ray spectrometer (EDS). The analysis starts with irradiating the sample with an electron beam. Characteristic X-rays emanating from the sample are spectrally dispersed and detected by the WDS. The intensities of the characteristic X-rays at positions where the characteristic X-ray peaks are detected are measured. At this time, the background intensities of the characteristic X-rays at the positions where the characteristic X-ray peaks are detected are found based on a mean atomic number calculated using values which are derived by quantitative analysis based on the characteristic X-ray intensities measured by the EDS at the corresponding analysis positions on the sample. The background intensities are subtracted from the peak intensities at the positions where the characteristic X-ray peaks are detected by the WDS. Thus, the net characteristic X-ray intensities are found.

REFERENCES:
patent: 4988872 (1991-01-01), Nagatsuka et al.
patent: 5065020 (1991-11-01), Kanda
patent: 2009/0052620 (2009-02-01), Takakura
patent: 59-214743 (1984-04-01), None
patent: 63-313043 (1988-12-01), None

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