Mask inspection apparatus, mask inspection method, and...

Details Mask inspection apparatus, mask inspection method, and... Mask inspection apparatus, mask inspection method, and...

2008-07-01

2008-07-01

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000

Reexamination Certificate

active

11235727

ABSTRACT:
A mask inspection apparatus includes: an electron gun for generating an electron beam; an exposure mask for shaping the electron beam into a predetermined cross-sectional shape; means for scanning the electron beam shaped by the exposure mask; means for selecting and transmitting part of the shaped electron beam, which selecting means includes a thin film having a small transmission aperture transmitting the electron beam scanned by the scanning means and includes a thick substrate having an opening larger than the small transmission aperture and a thickness greater than that of the thin film; and means for detecting the electron beam passed through the selecting means and outputting a current signal. The detecting means includes: a reflective body for reflecting the electron beam selected by the selecting means; and a detector for detecting the electron beam reflected by the reflective body.

REFERENCES:
patent: 6603120 (2003-08-01), Yamashita
patent: 2001-227932 (2001-08-01), None

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