Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1989-12-13
1991-03-12
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 250307, 250396R, H01J 37256
Patent
active
049994964
ABSTRACT:
The present invention relates to an apparatus for generating a magnification compensation signal for use in a scanning electron microscope. The apparatus includes an electron beam generator that generates a beam at a predetermined energy level in accordance with a beam energy signal. The apparatus allows for refocussing by varying the beam energy signal about a nominal value corresponding to the predetermined energy level. The apparatus also provides a magnification compensator producing a magnification compensation signal that varies in accordance with the variation of the beam energy signal from the predetermined energy level.
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Herriot Glen A.
Shaw David A.
Baker John A.
Berman Jack I.
Nanoquest (Canada) Inc.
Nguyen Kiet T.
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