Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-08-29
2006-08-29
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S307000
Reexamination Certificate
active
07098456
ABSTRACT:
One embodiment disclosed relates to a method for accurate electron beam metrology. A substrate with a target feature is loaded into a scanning electron microscope. An electron beam is scanned over the target feature, and scattered electrons are detected therefrom. A characteristic of the target feature is measured by finding optimal values for parameters of a mathematical model which accounts for substrate charging effects. Principal component analysis may be used to advantageously result in reduced requirements for processing time and/or computational speed.
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Adler David L.
Bevis Chris
Cecco Paola De
Goodstein David
Grella Luca
Berman Jack I.
KLA-Tencor Technologies Corporation
Okamoto & Benedicto LLP
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