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Method for anisotropic etching of silicon

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Method for applying decorative contrast designs to automotive an

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for assembly of printed circuit boards with ultrafine pit

Etching a substrate: processes – Forming or treating electrical conductor article
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Method for automatic determination of substrates states in...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for automatic determination of substrates states in...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for bonding copper-containing surfaces together

Etching a substrate: processes – Adhesive or autogenous bonding of two or more... – Etching improves or promotes adherence of preforms being bonded
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Method for breaking conducting path formed on or in printed-circ

Etching a substrate: processes – Forming or treating electrical conductor article
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Method for chemically scribing wafers

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Method for compensating for nonuniform etch profiles

Etching a substrate: processes – Forming or treating optical article – Lens
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Method for conditioning a plasma etch chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for conditioning a process chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for conditioning halogenated polymeric materials and stru

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Method for connecting electronic circuits in a multi-chip module

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Method for controlled removal of material from a solid surface

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for controlling a process for fabricating integrated...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for controlling CD during an etch process

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for controlling flatness of wafer and manufacturing...

Etching a substrate: processes – Forming or treating article containing magnetically...
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Method for controlling plasma processor

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for controlling the sheet resistance of thin film...

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating resistive material
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Method for converting and purifying materials for modifying...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching using radiation
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