Spin-rinse-drying process for electroplated semiconductor...
Spinodally patterned nanostructures
SPM sensor and process for producing it
Spray nozzle and method of manufacturing same
Spray nozzle and method of manufacturing same
Sputtered spring films with low stress anisotropy
Stabilized nitric acid compositions
Stabilizing composition for inorganic peroxide solutions
Staggered torsional electrostatic combdrive and method of...
Stamp for a lithographic process
Stamp for micro/nano imprint lithography using diamond-like...
Stamp for use in a lithographic process, method of...
Stamper, lithographic method of using the stamper and method...
Stamper, lithographic method of using the stamper and method...
Step and flash imprint lithography
Step and flash imprint lithography
Stepped etalon
Stopper manufacturing method of a silicon micromachining structu
Storage poly process without carbon contamination
Stripping method for photoresist used as mask in Ch.sub.4 /H.sub