Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate
2006-05-10
2010-10-26
Cleveland, Michael (Department: 1712)
Etching a substrate: processes
Masking of a substrate using material resistant to an etchant
Reexamination Certificate
active
07820064
ABSTRACT:
Devices based on spinodally decomposed periodic structures and their fabrication techniques.
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Cleveland Michael
Eslami Tabassom Tadayyon
Perkins Coie LLP
The Regents of the University of California
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