SPM sensor and process for producing it

Details SPM sensor and process for producing it SPM sensor and process for producing it

2005-10-25

2005-10-25

Font, Frank G. (Department: 2883)

Etching a substrate: processes

Forming or treating an article whose final configuration has...

C216S002000, C250S306000, C250S307000, C250S309000, C250S310000

Reexamination Certificate

active

06958124

ABSTRACT:
SPM sensor comprising a holding element, cantilever and a sensor tip, which projects out of the surface of the cantilever, at the free end of the cantilever, at least the cantilever and the three-surface sensor tip consisting of monocrystalline (100)-silicon, and a process for producing this sensor. The process is distinguished by inexpensive process steps, substantially wet-chemical etching steps. The result is that an SPM sensor with a rectangular cantilever arm having a tip which may or may not project beyond the free end is produced from a single piece.

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