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Method for forming an electrostatically force balanced silicon a

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for forming an interconnection in a semiconductor device

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Method for forming bump of probe card

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Reexamination Certificate

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Method for forming circuit pattern

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Method for forming contact hole

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Method for forming contact hole on semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Method for forming contact plugs in integrated circuits

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Method for forming corrosion inhibited conductor layer

Etching a substrate: processes – Forming or treating electrical conductor article
Reexamination Certificate

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Method for forming cylindrical lens arrays for solid state image

Etching a substrate: processes – Forming or treating optical article
Patent

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Method for forming deflection grating

Etching a substrate: processes – Forming or treating optical article
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Method for forming fine grooves and stamper and structure...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Method for forming flat surface vias in integrated circuit subst

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Method for forming inkjet nozzles having a coiled thermal...

Etching a substrate: processes – Forming or treating thermal ink jet article
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Method for forming inorganic lens array for solid state imager

Etching a substrate: processes – Forming or treating optical article – Lens
Patent

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Method for forming low contact resistance bonding pad

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Patent

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Method for forming low profile multi-layer coil merged thin...

Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate

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Method for forming MEMS-based spinning nozzle

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method for forming micro lenses

Etching a substrate: processes – Forming or treating optical article – Lens
Reexamination Certificate

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Method for forming micro lenses and semiconductor device...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method for forming micro patterns of semiconductor devices

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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