Method for forming inkjet nozzles having a coiled thermal...

Details Method for forming inkjet nozzles having a coiled thermal... Method for forming inkjet nozzles having a coiled thermal...

2008-06-24

2008-06-24

Alanko, Anita K (Department: 1792)

Etching a substrate: processes

Forming or treating thermal ink jet article

C438S021000

Reexamination Certificate

active

07390421

ABSTRACT:
A nozzle of an ink jet printer is formed by initially providing a silicon wafer having a circuitry wafer layer including electrical circuitry necessary for the operation of the thermal actuators on demand. The actuator is formed by forming a first inert material layer defining an actuator path in the shape of a planar coil starting at the thermal actuator anchor. Then, a first conductive material layer is formed adjacent the actuator path and attached to the first inert material layer.

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