Etching a substrate: processes – Forming or treating optical article – Lens
Patent
1996-03-11
1998-10-20
Powell, William
Etching a substrate: processes
Forming or treating optical article
Lens
216 38, 216 39, B44C 122
Patent
active
058242368
ABSTRACT:
A method of making an imager including the steps of providing a semiconductor substrate; forming a plurality of spaced image pixels in the substrate; depositing a dielectric layer over the image pixels and making this layer optically planar by chemical mechanical polishing, thereby forming an optically flat surface. The method further includes forming a plurality of depressions in the optically flat surface; uniformly depositing a lens material on the optically flat surface, entirely filling the depressions; and forming the lens material.
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Hawkins Gilbert Alan
Losee David Lawrence
Nichols David Newell
Nielsen Robert Leroy
Eastman Kodak Company
Owens Raymond L.
Powell William
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