Method for forming micro lenses

Details Method for forming micro lenses Method for forming micro lenses

2011-01-25

2011-01-25

Olsen, Allan (Department: 1716)

Etching a substrate: processes

Forming or treating optical article

Lens

C216S067000

Reexamination Certificate

active

07875196

ABSTRACT:
A method for forming micro lenses includes the step of performing an etching treatment to an object to be processed, which includes a lens material layer and a mask layer having lens shapes and formed on the lens material layer, using an etching gas including SF6gas and CHF3gas, an etching gas including SF6gas and CO gas, an etching gas including a gas having therein carbon and fluorine and CO gas, or an etching gas including two or more kinds of gases from a first gas having therein carbon and fluorine and a second gas having therein carbon and fluorine, to etch the lens material layer and the mask layer and transfer the lens shapes of the mask layer to the lens material layer, thereby forming the micro lenses.

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