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Dry etching method, microfabrication process and dry etching...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Electrochemical method to improve MR reader edge definition...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Electron beam writing method and apparatus for carrying out the

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is reusable
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Etch method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etchant

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching apparatus and method for semiconductor device

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching method and apparatus

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is reusable
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Etching method and composition for forming etching...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching method and etching apparatus

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching method using photoresist etch barrier

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching method, etched product formed by the same, and...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
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Etching method, etched product formed by the same, and...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching of hard masks

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Etching process and patterning process

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching recipe for the CrSi film

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Expandable stents and method for making same

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is exposed to nonimaging radiation
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Fabrication of small-scale cylindrical articles

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Fabrication of sub-50 nm solid-state nanostructures based on...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Flat panel display with spaced apart gate emitter openings

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
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