Mass production of cross-section TEM samples by focused ion...

MEMS capping method and apparatus

MEMS mirror made from topside and backside etching of wafer

MEMS sensor structure and microfabrication process therefor

Meso-microelectromechanical system having a glass beam and...

Metal alloy elements in micromachined devices

Method and apparatus for generation of fine particles

Method and apparatus for manufacturing a micromechanical device

Method and apparatus for micromachining using a magnetic...

Method and device for producing a system having a component...

Method and system for creating and using a logotype contact modu

Method for achieving improved selectivity in an etching process

Method for aligning optical devices with substrate

Method for creating microstructures

Method for drying micromechanical components

Method for etching photolithographically produced quartz crystal

Method for fabricating a high pressure piezoresistive transducer

Method for fabricating a scanning probe microscope probe

Method for fabricating a semiconductor device using a porous sil

Method for fabricating an isolated microelectromechanical...