Three dimensional etching process
Top-via etch technique for forming dielectric membranes
Tungsten coating for improved wear resistance and...
Use of an organic dielectric as a sacrificial layer
Use of chemical mechanical polishing in micromachining
Vacuum seal for field emission arrays
Vertical integration of a MEMS structure with electronics in...
Wafer stack and method of producing sensors
Wafer-level seal for non-silicon-based devices
Wet etching process