Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent
1996-08-27
1998-07-28
Barts, Samuel
Etching a substrate: processes
Etching of semiconductor material to produce an article...
216 40, 216 56, 216 58, 216 76, 216 79, 252 791, H01L 2100
Patent
active
057858713
ABSTRACT:
A process for the minute processing of diamonds which comprises
REFERENCES:
patent: 5344526 (1994-09-01), Nishibayashi et al.
patent: 5366923 (1994-11-01), Beyer et al.
patent: 5538911 (1996-07-01), Yamazaki
Barts Samuel
LG Semicon Co. Ltd.
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