LandOfFree - US Patents - Listing for Electricity: electrical systems and devices,Electric charge generating or conducting means,Use of forces of electric charge or field

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Temperature cycling ceramic electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Thermally conductive chuck for vacuum processor

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Time-based wafer de-chucking from an electrostatic chuck...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Tri-polar electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Unbalanced bipolar electrostatic chuck power supplies and method

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Using coulomb forces to form 3-D reconfigurable antenna...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Vacuum compatible, deformable electrostatic chuck with high...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Vacuum plasma processor and method of operating same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Vacuum plasma processor and method of operating same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Variable high temperature chuck for high density plasma chemical

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer chuck system

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer chucks and the like including substrate-adhesion...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer grounding method for electrostatic clamps

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer holding device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer platen equipped with electrostatic clamp, wafer...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer processing apparatus having a tunable electrical...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer release method and apparatus

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer sensing and clamping monitor

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Wafer space supporting apparatus installed on electrostatic...