Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1991-05-02
1992-10-13
Pellinen, A. D.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
051556529
ABSTRACT:
An electrostatic chuck 40 assembly includes, from top to bottom: a top isolation layer 42; an electrostatic pattern layer 44 comprised of an electrically conductive electrostatic pattern 46 disposed on a substrate 45; a heating layer 50 comprised of an electrically conductive heating pattern 54 disposed on a substrate 52; a support 60; and, a heat sink base 70 having backside cooling and insulating channels 78, 80 provided therein.
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Logan Joseph S.
Ruckel Raymond R.
Tompkins Robert E.
Westerfield, Jr. Robert P.
Balconi-Lamica Michael J.
Fleming Fritz M.
International Business Machines - Corporation
Pellinen A. D.
Romanchik Richard A.
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