Tri-polar electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

H02N 1300

Patent

active

055723985

ABSTRACT:
A tri-polar electrostatic chuck has both positive and negative electrodes housed on a non-polarized base housing. A non-polarized guard ring surrounds the outer periphery of the chuck and enclosing the electrodes. A wafer is placed atop the chuck with its back-side cooled by a cooling gas that is piped up through the chuck. The edge of the wafer is made to reside over the guard ring, instead of over one of the polarized electrodes. The proximity of the non-polarized guard ring to the wafer edge helps to reduce the amount of plasma leakage around the edge of the wafer, resulting in less breakdown of the dielectric coating of the chuck. The positioning of the electrodes also provides for a uniform impedance across the processing surface of the wafer.

REFERENCES:
patent: 4384918 (1983-05-01), Abe
patent: 5055964 (1991-10-01), Logan et al.
patent: 5099571 (1992-03-01), Logan et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Tri-polar electrostatic chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Tri-polar electrostatic chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Tri-polar electrostatic chuck will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2019734

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.