Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1997-03-26
1998-11-10
Fleming, Fritz
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
361235, 279128, H02N 1300
Patent
active
058353356
ABSTRACT:
A method of providing unbalanced voltages to a bipolar electrostatic chuck of a substrate processing chamber. The method includes providing a variable balanced voltage power supply, which is configured for producing, responsive to a control signal, balanced differential output voltages on a first and second terminals of the variable balanced voltage power supply. The method further includes coupling the first terminal of the variable balanced voltage power supply to a first node. The first node is coupled to a first resistive element of a resistor bridge. The method also includes coupling the second terminal of the variable balanced voltage power supply to a second node. The second node is coupled to a second resistive element of the resistor bridge. The first resistive element is lower in resistance value than the second resistive element. There is further included coupling the first resistive element and the second resistive element to a common reference terminal, thereby producing, without employing a power supply other than the variable balanced voltage power supply, the unbalanced voltages at the first node and the second node when the variable balanced voltage power supply is turned on.
REFERENCES:
patent: 4692836 (1987-09-01), Suzuki
patent: 5325261 (1994-06-01), Horwitz
patent: 5463525 (1995-10-01), Barnes et al.
patent: 5467249 (1995-11-01), Barnes et al.
patent: 5535507 (1996-07-01), Barnes et al.
patent: 5557215 (1996-09-01), Saeki et al.
patent: 5561585 (1996-10-01), Barnes et al.
patent: 5708250 (1998-01-01), Benjamin et al.
Internationa Search Report Dated Jul. 9, 1998 for PCT/US98/05676 (international counterpart to the present application).
Lai Canfeng
Ross Charles P.
Fleming Fritz
Lam Research Corporation
LandOfFree
Unbalanced bipolar electrostatic chuck power supplies and method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Unbalanced bipolar electrostatic chuck power supplies and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Unbalanced bipolar electrostatic chuck power supplies and method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1523337