Wafer sensing and clamping monitor

Details Wafer sensing and clamping monitor Wafer sensing and clamping monitor

1993-01-15

1995-07-25

Pellinen, A. D.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

054367905

ABSTRACT:
A wafer position and clamp sensor. A circuit monitors capacitance between two electrodes within a wafer support. With no wafer on the support, the capacitance falls in one range, with the wafer in place but not clamped, the capacitance falls in a second range and with the wafer held in place by an electrostatic attraction the capacitance falls in a third range. The sensed capacitance is converted to a frequency and then a DC voltage level that can easily be sensed and used to confirm wafer placement and then confirm wafer clamping.

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patent: 4751609 (1988-06-01), Kashahara
patent: 4864461 (1989-09-01), Kashara
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patent: 5103367 (1992-04-01), Horwitz et al.
patent: 5173834 (1992-12-01), Sogoh
patent: 5315473 (1994-05-01), Collins et al.
patent: 5325261 (1994-06-01), Horwitz

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