Thermally conductive chuck for vacuum processor

Details Thermally conductive chuck for vacuum processor Thermally conductive chuck for vacuum processor

1997-09-19

1999-08-10

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N 1300

Patent

active

059368292

ABSTRACT:
A chuck body mounts a substrate within a vacuum chamber. Contiguous portions of the substrate and the chuck body form a heat-transfer interface. An intermediate sealing structure seals the chuck body to the substrate independently of any contact between the chuck body and the substrate and forms a separately pressurizable region within the vacuum chamber. A control system promotes flows of gas through a periphery of the heat-transfer interface within the separately pressurizable region for controlling gas pressures at the heat-transfer interface.

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