LandOfFree - US Patents - Listing for Electricity: electrical systems and devices,Electric charge generating or conducting means,Use of forces of electric charge or field

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method for reducing particles from an electrostatic chuck...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method for restoring an electrostatic chuck force

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of clamping a wafer during a process that creates...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of de-chucking wafer using direct voltage and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of determining a dechucking voltage which nullifies a res

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of determining a target mesa configuration of an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of determining the correct average bias compensation...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of feedback control of ESC voltage using wafer...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of holding wafer, method of removing wafer and electrosta

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of platen fabrication to allow electrode pattern and...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method of removing substrate and apparatus for controlling appli

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Microactuator and method for controlling resonant frequency ther

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Micromachined rotating integrated switch

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Micromachined silicon electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Mobile holder for a wafer

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Monocrystalline ceramic coating having integral bonding intercon

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Monocrystalline ceramic electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Monolithically integrated switched capacitor bank using micro el

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Monopolar electrostatic chuck having an electrode in contact wit