Microactuator and method for controlling resonant frequency ther

Details Microactuator and method for controlling resonant frequency ther Microactuator and method for controlling resonant frequency ther

1998-04-24

2000-11-07

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

200181, H02N 1500

Patent

active

061445452

ABSTRACT:
A microactuator is provided. The microactuator includes a substrate, a support fixed to an upper surface of the substrate, an elastic member connected to the support, an inertial member connected to the elastic member and spaced apart from the upper surface of the substrate by a predetermined distance, to be vibrated in a first direction parallel to the substrate, moving electrodes protruding from both sides of the inertial member in a second direction perpendicular to the first direction, fixed electrodes fixed on the substrate, facing the moving electrodes, spaced apart from the moving electrodes by a predetermined distance, and supplying an electrostatic repulsive force in the first direction to the moving electrodes when an electric potential is applied, common electrodes fixed on the substrate in the first direction, spaced apart from the moving electrodes and the fixed electrodes by a predetermined distance, and a power supply applying an electric potential to the moving electrodes, the fixed electrodes and the common electrodes.

REFERENCES:
patent: 3686593 (1972-08-01), Zakaria
patent: 5124879 (1992-06-01), Goto
patent: 5168249 (1992-12-01), Larson
patent: 5794761 (1998-08-01), Renaud et al.
Ki Bang Lee et al., "A Lateral Repulsive-force Drive Using Asymmetric Electrostatic Field," published Apr. 26, 1997, in Collection of Papers by MEMS Study Group of the Korea Institute of Electrical Engineers, consisting of 4 cover sheets, and pp. 167-176. (Partial English Language Translation Attached).

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