Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1998-12-11
2000-06-06
Fleming, Fritz
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
361233, 200181, H01P 110
Patent
active
060726865
ABSTRACT:
A microelectromechanical system (MEMS) switch has a bidirectionally rotating member having two positions for integrated circuit connection. The switch is formed on a circular standoff bearing for rotating the switch in the plane of the substrate using conventional processing techniques. Control traces carry electrical signals generating electrical fields to provide an electro-static force upon the rotating switch member to rotate the switch clockwise or counter-clockwise to position and maintain it in either of two positions. The MEMS switch has wide applications to a variety of microelectromechanical system circuit applications.
REFERENCES:
patent: 5121089 (1992-06-01), Larson
"Integrated Fabrication of Polysilicon Mechanism", M.Mehregany, K.J. Gabriel, W.S.N. Trimmer, IEEE Transactions on Electron Devices, vol. 35, No. 6, Jun. 1988.
"A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC Up to GHZ", J. Jason Yao and M. Frank Chang, Proceedings of the 8th International Conference on Solid State Sensors and Acuators and Eurosensors IX, pp. 384-387, Jun. 25-29, 1995.
Fleming Fritz
Reid Derrick Michael
The Aerospace Corporation
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