Method of determining the correct average bias compensation...

Details Method of determining the correct average bias compensation... Method of determining the correct average bias compensation...

2007-05-15

2007-05-15

DeBeradinis, Robert L. (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C307S130000, C279S128000

Reexamination Certificate

active

10882837

ABSTRACT:
A method for removing a substrate that is attached to a bipolar electrostatic chuck (ESC) by application of a bipolar ESC voltage is provided which includes discontinuing the bipolar ESC voltage after processing a current substrate, and determining a monopolar component error of the processing. The method also includes correcting the monopolar component error for a subsequent substrate.

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