Anti-stick electrostatic chuck for a low pressure environment

Details Anti-stick electrostatic chuck for a low pressure environment Anti-stick electrostatic chuck for a low pressure environment

1994-03-14

1995-06-20

Gaffin, Jeffrey A.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

269 8, 269903, 279128, H02N 1300

Patent

active

054265584

ABSTRACT:
An electrostatic chuck for releasably holding a workpiece comprising a substrate formed by a pair of dielectric elements, each being a single crystal, with at least one electrode embedded therebetween, and a voltage source coupled to each electrode. The chuck is preferably fabricated from two substantially planar dielectric members sandwiched around a brazing compound which become electrodes after the assembly is heated and then cooled.

REFERENCES:
patent: 4480284 (1984-10-01), Tojo et al.
patent: 4667110 (1987-05-01), Kariya
patent: 5103367 (1992-04-01), Horowitz et al.
patent: 5151845 (1992-09-01), Watanabe et al.
patent: 5155652 (1992-10-01), Logan et al.
patent: 5166856 (1992-11-01), Liporace et al.

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