Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1998-07-31
2000-12-19
Jackson, Stephen W.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
H01G 2300
Patent
active
061634484
ABSTRACT:
An apparatus and method for ex-situ measurement of electrostatic chuck performance parameters and correlating ex-situ measurements to in-situ chuck performance. The apparatus comprises a probe, a fixture, a data acquisition system and a controller. The fixture secures a probe head in a substantially fixed position relative to the chuck. The apparatus coordinates measurements of the chuck surface potential as a function of time with the voltage applied to the chuck electrodes. The method comprises fixing the chuck and probe head to the fixture, measuring an ex-situ performance parameter of the chuck, such as surface potential, and comparing the measured parameter to a predetermined in-situ performance profile. The ex-situ performance parameter measurement can be measured as a function of time and/or coordinated with a change in the voltage applied to the chuck electrodes. By comparing the measured parameter to an ideal in-situ performance profile, the ex-situ measurement serves as a predictor of in-situ chuck behavior.
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Applied Materials Inc.
Jackson Stephen W.
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