Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1996-10-17
1998-04-07
Gaffin, Jeffrey A.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, H02N 1300
Patent
active
057371776
ABSTRACT:
A method and apparatus for actively controlling the DC cathode potential of a wafer support pedestal within a semiconductor wafer processing system. The apparatus contains a variable DC power supply coupled through an RF filter to a cathode pedestal. The variable DC power supply is actively controlled by a control signal generated by a cathode bias control unit, e.g., a computer or other control circuitry. The cathode bias control unit can be as simple as an operator adjustable control signal, e.g., a rheostat. However, for more accurate control of the DC power supply, a feedback circuit is used that generates a control signal that is proportional to the peak-to-peak voltage on a cathode pedestal. The application of the DC bias to the pedestal reduces the DC potential difference between the wafer and the cathode and, thereby avoids arcing from the wafer to the pedestal.
REFERENCES:
patent: 4399016 (1983-08-01), Tsukada et al.
patent: 4968374 (1990-11-01), Tsukada et al.
patent: 5467249 (1995-11-01), Barnes et al.
Contreras Mark Steven
Dahimene Mahmoud
Luscher Paul E.
Mett Richard Raymond
Salimian Siamak
Applied Materials Inc.
Gaffin Jeffrey A.
Huynh Thuy-Trang
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