Apparatus for manufacturing semiconductor device

Details Apparatus for manufacturing semiconductor device Apparatus for manufacturing semiconductor device

2005-07-12

2005-07-12

Hassanzadel, P. (Department: 1763)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C156S345470, C279S128000

Reexamination Certificate

active

06917508

ABSTRACT:
An apparatus for manufacturing a semiconductor device includes a chamber, upper and lower electrodes spacing apart and facing each other in the chamber, the upper and lower electrodes supplied with high frequency power to form plasma, an electrostatic chuck on the lower electrode and settling a substrate thereon, a chuck base between the electrostatic chuck and the lower electrode, and protecting the electrostatic chuck, and a helium line supplying helium gas to a gap between the substrate and the electrostatic chuck, the helium line filled with a plurality of fine insulating balls.

REFERENCES:
patent: 5810933 (1998-09-01), Mountsier
patent: 6606234 (2003-08-01), Divakar
patent: 09-289201 (1997-11-01), None
patent: 1999-0085680 (1999-12-01), None

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