Steady-state glow-discharge plasma at atmospheric pressure

Details Steady-state glow-discharge plasma at atmospheric pressure Steady-state glow-discharge plasma at atmospheric pressure

1999-02-01

2000-09-12

Bettendorf, Justin P.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

118723E, 21912136, H05H 124

Patent

active

061182184

ABSTRACT:
A plasma treater incorporates a porous metallic layer in one of the electrodes. The porous layer is selected with pores of average size within one order of magnitude of the mean free path of the plasma gas at atmospheric pressure. The plasma gas is injected into the electrode at substantially atmospheric pressure and allowed to diffuse through the porous layer, thereby forming a uniform glow-discharge plasma. The film material to be treated is exposed to the plasma created between this electrode and a second electrode covered by a dielectric layer. Because of the micron size of the pores of the porous metal, each pore also produces a hollow cathode effect that facilitates the ionization of the plasma gas. As a result, a steady-state glow-discharge plasma is produced at atmospheric pressure and at power frequencies as low as 60 Hz.

REFERENCES:
patent: 4496423 (1985-01-01), Walton
patent: 4507539 (1985-03-01), Sando et al.
patent: 5366555 (1994-11-01), Kelly
patent: 5753886 (1998-05-01), Iwamura et al.

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