Stabilizer for switch-mode powered RF plasma

Details Stabilizer for switch-mode powered RF plasma Stabilizer for switch-mode powered RF plasma

1998-05-05

2000-04-04

Shingleton, Michael B

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511151, 31511171, H01J 724

Patent

active

060465468

ABSTRACT:
Circuitry and techniques designed to allow stable and continuous delivery of alternating power to a plasma with switch-mode power supply (16) include a variety of embodiments. Parallel, series, and other circuit elements connected across switching element (7) are tuned so that energy at other than the fundamental frequency is absorbed and dissipated. This energy may be only at the second harmonic or it may be across broad frequency ranges through selecting high impedance at the fundamental frequency and relatively low impedance at other frequencies. In overcoming instabilities, oscillations, and even changing class of operation of the switch-mode power supply, the stabilizing element absorbs the energy to avoid allowing it to affect switch (7) of power supply (16).

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