Scanned electron cyclotron resonance plasma source

Details Scanned electron cyclotron resonance plasma source Scanned electron cyclotron resonance plasma source

1992-06-23

1993-05-04

Mis, David

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 20429816, 20429837, 20429838, C23C 1422, H05H 146

Patent

active

052085120

ABSTRACT:
Electron cyclotron apparatus is described in which the locus of cyclotron resonance is scanned away from and toward the axis of a magnetic field by varying the strength of the magnetic field, the frequency of electromagnetic waves passing along its axis, or both.

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IBM Technical Disclosure Bulletin; W. C. Ko and M. F. Uman; vol. 18 No. 11; Apr. 1976; pp. 3662-3663.

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