Stable matching networks for plasma tools

Details Stable matching networks for plasma tools Stable matching networks for plasma tools

1996-12-03

1999-02-02

Mottola, Steven

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

333 173, 31511151, H05H 124

Patent

active

058669850

ABSTRACT:
Apparatus and method for obtaining stable matching networks for plasma tools for use in the plasma processing industry. In an RF plasma apparatus, running at a matched condition for a transmission line and the plasma tool matching network such that the input impedance at the input to the transmission line is different than that of the output impedance of an RF generator and such that when the plasma density in the plasma tool decreases the input impedance will match the output impedance of the generator.

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patent: 5383019 (1995-01-01), Farrell et al.

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