Methods of depositing a metal oxide layer or film using a...
Methods of forming atomic layers of a material on a...
Methods of forming barium strontium titanate layers
Methods of forming material on a substrate, and a method of...
Methods of providing uniform gas delivery to a reactor
Methods of selectively incorporating metals onto substrates
Methods of uniformity control for low flow process and...
MOCVD of indium oxide and indium/tin oxide films on substrates
MOCVD of SBT using tetrahydrofuran-based solvent system for...
MOCVD of SBT using toluene-based solvent system for...
MOCVD process using alkaline earth metal-heptane dionate compoun
Modulated temperature method of atomic layer deposition...
MT CVD process
Multi-layer approach for optimizing ferroelectric film performan
Multiple precursor cyclical deposition system
Multiple precursor cyclical deposition system
Multiple precursor cyclical deposition system
Near-room temperature CVD synthesis of organic polymer/oxide...
Near-room temperature thermal chemical vapor deposition of...
Nitrogen passivation of interface states in SiO 2 /SiC...