Manufacturing method of barrier-forming film
Material for inverting static electricity method for...
Membrane reparation and poer size reduction using interfacial oz
Mesoporous permeation layers for use on active electronic...
Mesoporous permeation layers for use on active electronic...
Metal nitride deposition by ALD with reduction pulse
Metal organic chemical vapor deposition method with controlled g
Metalorganic chemical vapor deposition of ferroelectric thin fil
Method and apparatus for deposition of tungsten silicides
Method and apparatus for deposition of zinc sulfide films
Method and apparatus for film deposition
Method and apparatus for forming a dielectric film using...
Method and apparatus for forming insitu boron doped...
Method and apparatus for forming insulating film containing...
Method and apparatus for increasing deposition quality of a chem
Method and apparatus for monolayer deposition (MLD)
Method and apparatus for preparing integrated circuit thin films
Method and apparatus for reducing particle contamination in...
Method and apparatus, with redundancies, for treating...
Method and device for depositing thin layers via ALD/CVD...