Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1998-04-22
2000-07-18
Speer, Timothy M.
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
4273762, 427377, 20419218, 2041922, 20419222, C23C 1600
Patent
active
060904437
ABSTRACT:
A multi-layer ferroelectric thin film includes a nucleation layer, a bulk layer, and an optional cap layer. A thin nucleation layer of a specific composition is implemented on a bottom electrode to optimize ferroelectric crystal orientation and is markedly different from the composition required in the bulk of a ferroelectric film. The bulk film utilizes the established nucleation layer as a foundation for its crystalline growth. A multi-step deposition process is implemented to achieve a desired composition profile. This method also allows for an optional third composition adjustment near the upper surface of the film to ensure compatibility with an upper electrode interface and to compensate for interactions resulting from subsequent processing.
REFERENCES:
patent: 5206788 (1993-04-01), Larson et al.
patent: 5397446 (1995-03-01), Ishihara et al.
patent: 5426075 (1995-06-01), Perino et al.
patent: 5519566 (1996-05-01), Perino et al.
patent: 5714194 (1998-02-01), Komai et al.
patent: 5719417 (1998-02-01), Roeder et al.
patent: 5817170 (1998-10-01), Desu et al.
patent: 5824590 (1998-10-01), New
Burton, Esq. Carol W.
Meza, Esq. Peter J.
Ramtron International Corporation
Speer Timothy M.
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