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Trap for capturing waste by-product generated by a chemical vapo

Coating apparatus – Gas or vapor deposition
Patent

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Treating device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Treatment of deagglomerated particles with plasma-activated...

Coating apparatus – Gas or vapor deposition – Means to coat or impregnate particulate matter
Reexamination Certificate

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Treatment system and treatment apparatus with multi-stage carrie

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Treatment system including a plurality of treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Truncated dummy plate for process furnace

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Tube and injector for preheating gases in a chemical vapor depos

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Tube apparatus for manufacturing semiconductor device

Coating apparatus – Gas or vapor deposition
Patent

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Tunable gas distribution plate assembly

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Tungsten chamber with stationary heater

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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Tungsten film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Turntable mechanism

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Two chamber plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Utility Patent

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Two-compartment chamber for sequential processing

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Two-piece chuck

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Two-piece slit valve insert for vacuum processing system

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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