Reduced friction lift pin

Details Reduced friction lift pin Reduced friction lift pin

2005-05-03

2005-05-03

Hassanzadeh, P. (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S715000, C118S725000, C118S500000, C156S345510, C156S345520, C156S345530, C204S298010, C204S298040, C204S298310, C204S298320, C204S298330, C204S298340

Reexamination Certificate

active

06887317

ABSTRACT:
A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide hole, thereby reducing pin scratching, particle generation, component wear, and increasing the useful life of the pin. In another embodiment, a flat-bottom tip is provided to promote self-standing of the lift pin, reducing pin tilting or leaning of the lift pin within the guide hole.

REFERENCES:
patent: 5796066 (1998-08-01), Guyot
patent: 5848670 (1998-12-01), Salzman
patent: 5879128 (1999-03-01), Tietz et al.
patent: 5900062 (1999-05-01), Loewenhardt et al.
patent: 6120609 (2000-09-01), Selyutin et al.
patent: 6146504 (2000-11-01), Patadia et al.
patent: 20020011204 (2002-01-01), Gujer et al.
patent: 20030075387 (2003-04-01), Wang et al.
patent: 07176472 (1995-07-01), None

Affiliated with

Also associated with

Rating

Reduced friction lift pin does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Reduced friction lift pin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Reduced friction lift pin will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3401381