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Method of applying hydrocarbon barrier to a plastic fuel tank

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method of crystallizing amorphous silicon layer and...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method of in-situ cleaning for LPCVD teos pump

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method of treating active material

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Methods of depositing materials on substrates

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Microwave plasma chemical vapor deposition apparatus for continu

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Microwave plasma CVD apparatus having substrate shielding member

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Mixed gas supply system with a backup supply system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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MOCVD system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Modular architecture for semiconductor wafer fabrication...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Modular continuous vapor deposition system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Modular IBAD apparatus for continuous coating

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Modular vapor processor system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Molecular beam generator using thermal decomposition for manufac

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Multi-chamber integrated process system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Multi-chamber wafer process equipment having plural, physically

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Multi-position load lock chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Multi-station deposition apparatus and method

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Multi-workpiece processing chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Multi-workpiece processing chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
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